18760808. METHOD OF MANUFACTURING LIGHT-EMITTING ELEMENT (NICHIA CORPORATION)
METHOD OF MANUFACTURING LIGHT-EMITTING ELEMENT
Organization Name
Inventor(s)
Naoto Furuha of Kaifu-gun (JP)
METHOD OF MANUFACTURING LIGHT-EMITTING ELEMENT
This abstract first appeared for US patent application 18760808 titled 'METHOD OF MANUFACTURING LIGHT-EMITTING ELEMENT
Original Abstract Submitted
A method of manufacturing a light-emitting element includes: preparing a wafer including a substrate, and a semiconductor structure disposed on the substrate; and forming a plurality of light-emitting element regions by dividing the semiconductor structure. The forming of the plurality of light-emitting element regions includes: forming a plurality of first masks on the semiconductor structure such that each of the plurality of first masks covers a respective first region where one of the plurality of light-emitting element regions is to be formed, and each of the plurality of first masks has an area greater than an area of the respective first region in a plan view, and exposing the substrate through the semiconductor structure by removing a portion of the semiconductor structure that is not covered by the plurality of first masks.