18759451. SUBSTRATE PROCESSING SYSTEM AND DECOMPRESSION STRUCTURE (EBARA CORPORATION)
SUBSTRATE PROCESSING SYSTEM AND DECOMPRESSION STRUCTURE
Organization Name
Inventor(s)
Tomoatsu Ishibashi of Tokyo (JP)
SUBSTRATE PROCESSING SYSTEM AND DECOMPRESSION STRUCTURE
This abstract first appeared for US patent application 18759451 titled 'SUBSTRATE PROCESSING SYSTEM AND DECOMPRESSION STRUCTURE
Original Abstract Submitted
A substrate processing system capable of supplying a gas-dissolved liquid having a supersaturated amount of dissolved gas without generating large bubbles in a middle of a supply line is disclosed. The substrate processing system includes a control device configured to control an operation of a bubble generation device. The control device is configured to control at least one of a pressure regulator and a boost pump so that a pressure of a gas supplied to a gas-dissolved liquid generation device is smaller than a pressure of a liquid supplied to the gas-dissolved liquid generation device.
