18749791. TEST APPARATUS (DISCO CORPORATION)
TEST APPARATUS
Organization Name
Inventor(s)
Makoto Kobayashi of Tokyo (JP)
TEST APPARATUS
This abstract first appeared for US patent application 18749791 titled 'TEST APPARATUS
Original Abstract Submitted
A test apparatus includes a support base that supports an undersurface of a chip, a pressing unit that presses the chip supported by the support base, and a load measuring instrument that measures a load applied when the pressing unit presses the chip. The pressing unit includes a first test indenter that performs a three-point bending test by pressing the chip supported by the support base and a second test indenter that performs a four-point bending test by pressing the chip supported by the support base, and the first test indenter and the second test indenter are configured to be selectable when the chip supported by the support base is pressed by the pressing unit.