18734300. DEPOSITION MASK AND METHOD OF FABRICATING THE SAME (Samsung Display Co., LTD.)
DEPOSITION MASK AND METHOD OF FABRICATING THE SAME
Organization Name
Inventor(s)
Young Min Moon of Yongin-si KR
DEPOSITION MASK AND METHOD OF FABRICATING THE SAME
This abstract first appeared for US patent application 18734300 titled 'DEPOSITION MASK AND METHOD OF FABRICATING THE SAME
Original Abstract Submitted
A method of fabricating a mask includes defining cell areas and a mask frame area on a silicon substrate, the mask frame area excluding the cell areas, the mask frame area may include a mask rib region partitioning the cell areas and an outer frame region disposed at an outermost position of the silicon substrate, forming a groove in the mask rib region, forming a metal mask rib by forming a metal in the groove, forming a photoresist pattern including openings in each of the cell areas, growing a plating film in each of the cell areas, forming a mask membrane formed of the plating film by removing the photoresist pattern, and etching a rear surface of the silicon substrate to form cell openings associated with the cell areas, respectively.