18728885. HIGH-PRECISION HETEROGENEOUS INTEGRATION (BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM)
HIGH-PRECISION HETEROGENEOUS INTEGRATION
Organization Name
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
Inventor(s)
Sidlgata V. Sreenivasan of Austin TX US
HIGH-PRECISION HETEROGENEOUS INTEGRATION
This abstract first appeared for US patent application 18728885 titled 'HIGH-PRECISION HETEROGENEOUS INTEGRATION
Original Abstract Submitted
A method for implementing high-precision heterogeneous integration. An etch of a first bonding surface and a second bonding surface is performed to create nanostructures in the first bonding surface and/or the second bonding surface. The first and second bonding surfaces are bonded together, where a particle lands at a bonding interface resulting in an exclusion zone that is at least two times smaller than a bonding of two bonding surfaces with no nanostructures.