18725253. FILM FORMING APPARATUS AND FILM FORMING METHOD (SHIN-ETSU CHEMICAL CO., LTD.)
FILM FORMING APPARATUS AND FILM FORMING METHOD
Organization Name
Inventor(s)
Hiroshi Hashigami of Annaka-shi JP
FILM FORMING APPARATUS AND FILM FORMING METHOD
This abstract first appeared for US patent application 18725253 titled 'FILM FORMING APPARATUS AND FILM FORMING METHOD
Original Abstract Submitted
A film forming apparatus including an atomizing means for atomizing a raw material solution to form a raw material mist, a carrier gas supply means to transport the raw material mist, a mist supply means to supply a gas mixture, in which the raw material mist and the carrier gas are mixed, to a surface of a substrate, a stage on which the substrate is placed, a measurement means for directly or indirectly measuring a supply amount of the raw material mist to output a signal in accordance with a measured value obtained by the measurement, and a control means for receiving the signal to adjust the supply amount of the raw material mist based on the signal.