18724335. FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION METHOD (Tokyo Electron Limited)
FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION METHOD
Organization Name
Inventor(s)
Masato Hayashi of Koshi City, Kumamoto JP
Koudai Higashi of Koshi City, Kumamoto JP
FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION METHOD
This abstract first appeared for US patent application 18724335 titled 'FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION METHOD
Original Abstract Submitted
A foreign substance detection device configured to detect a foreign substance contained in a processing liquid configured to process a substrate includes multiple processing liquid flow path forming mechanisms configured to form multiple processing liquid flow paths through which the processing liquid to be supplied to the substrate flows; a radiator configured to radiate radiation light from a light source toward each of the multiple processing liquid flow paths; and a light receiver configured to receive light emitted from the processing liquid flow paths by radiating the radiation light. The radiator includes a light adjuster configured to adjust a light amount of the radiation light radiated to the multiple processing liquid flow paths.