18709795. METHOD AND SYSTEM OF REDUCING CHAMBER VIBRATION (ASML Netherlands B.V.)
METHOD AND SYSTEM OF REDUCING CHAMBER VIBRATION
Organization Name
Inventor(s)
Shaoqian Wang of Fremont CA (US)
Peter Paul Hempenius of Eindhoven (NL)
Omar Aljanaideh of Santa Clara CA (US)
METHOD AND SYSTEM OF REDUCING CHAMBER VIBRATION
This abstract first appeared for US patent application 18709795 titled 'METHOD AND SYSTEM OF REDUCING CHAMBER VIBRATION
Original Abstract Submitted
Systems, apparatuses, and methods for reducing vibration of a chamber may include obtaining predefined motion data associated with a transferring device stiffly coupled to a chamber; determining movement of the transferring device based on the predefined motion data before the transferring device moves; determining, based on the movement, a first force to be applied to the chamber caused by the movement; and causing a support device of the chamber to apply a second force to the chamber to counteract the first force when the transferring device moves.