18708512. LOAD ADJUSTING SYSTEM AND LOAD ADJUSTING METHOD (EBARA CORPORATION)
LOAD ADJUSTING SYSTEM AND LOAD ADJUSTING METHOD
Organization Name
Inventor(s)
Hiroyuki Takenaka of Tokyo (JP)
LOAD ADJUSTING SYSTEM AND LOAD ADJUSTING METHOD
This abstract first appeared for US patent application 18708512 titled 'LOAD ADJUSTING SYSTEM AND LOAD ADJUSTING METHOD
Original Abstract Submitted
A load adjusting system includes: a bevel grinding device including a grinding head configured to grind a bevel part of a substrate; and a control device, the control device is configured to: acquire, from a load measuring device that performs measurement of a pressing load applied from the grinding head, measurement data acquired by performing the measurement; calculate, based on the measurement data and based on a set parameter set for the grinding head, an adjustment value used for adjusting the pressing load; and control a pressing operation of the grinding head based on the adjustment value.
