18701384. SYSTEM AND METHOD FOR CARBON PLUG FORMATION (LAM RESEARCH CORPORATION)
SYSTEM AND METHOD FOR CARBON PLUG FORMATION
Organization Name
Inventor(s)
Daniela Anjos Rigsby of Tualatin OR (US)
Todd Schroeder of Sherwood OR (US)
SYSTEM AND METHOD FOR CARBON PLUG FORMATION
This abstract first appeared for US patent application 18701384 titled 'SYSTEM AND METHOD FOR CARBON PLUG FORMATION
Original Abstract Submitted
One example provides a fabrication tool comprising a chamber, a pedestal electrode and a showerhead electrode arranged in the chamber, one or more gas inlets into the chamber, a vacuum pump system, a radiofrequency (RF) power source configured to form an RF plasma between the pedestal electrode and the showerhead electrode, and a controller comprising a processor and memory. The memory comprises instructions executable by the processor to operate the flow control hardware to introduce a hydrogen-containing reducing agent and a hydrocarbon gas into the chamber, and to operate the RF power source to form a plasma between the pedestal electrode and the showerhead electrode to fully deposit a carbon plug in a recess of a workpiece positioned on a pedestal within the chamber in a single plasma deposition cycle with no intermediate carbon removal process.
