18694732. IMAGING DEVICE (SONY SEMICONDUCTOR SOLUTIONS CORPORATION)
IMAGING DEVICE
Organization Name
SONY SEMICONDUCTOR SOLUTIONS CORPORATION
Inventor(s)
KAZUYA Sugimura of KANAGAWA JP
IMAGING DEVICE
This abstract first appeared for US patent application 18694732 titled 'IMAGING DEVICE
Original Abstract Submitted
An imaging device capable of reducing the capacitance of a transfer gate electrode is provided. The imaging device includes a first substrate and a plurality of pixels provided in the first substrate. Each of the plurality of pixels includes a photoelectric conversion portion provided in the first substrate, a charge storage portion provided in the first substrate, and a transfer transistor provided on a first surface side of the first substrate to transfer charges from the photoelectric conversion portion to the charge storage portion. The transfer transistor includes a transfer gate electrode provided on the first surface of the first substrate via an insulating film interposed between the transfer gate electrode and the first surface. The insulating film includes a first insulating film located on a channel region formed on the first substrate, and a second insulating film located on a region other than the channel region on the first substrate. The second insulating film is thicker than the first insulating film.