18653097. FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN simplified abstract (Applied Materials, Inc.)

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN

Organization Name

Applied Materials, Inc.

Inventor(s)

Lara Hawrylchak of Gilroy CA (US)

Chaitanya A. Prasad of Cupertino CA (US)

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN - A simplified explanation of the abstract

This abstract first appeared for US patent application 18653097 titled 'FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN

The abstract of this patent application describes an improved substrate support pedestal assembly, which includes a shaft and a substrate support pedestal coated with a ceramic material.

• The substrate support pedestal assembly consists of a shaft and a substrate support pedestal.
• The substrate support pedestal is mechanically coupled to the shaft and coated with a ceramic material on its top surface.

Potential Applications: - Semiconductor manufacturing - Thin film deposition processes - Solar panel production

Problems Solved: - Enhanced stability and support for substrates during manufacturing processes - Improved heat resistance and durability of the substrate support pedestal

Benefits: - Increased efficiency in manufacturing processes - Reduced risk of substrate damage - Extended lifespan of equipment

Commercial Applications: Title: Enhanced Substrate Support Pedestal Assembly for Semiconductor Manufacturing This technology can be used in semiconductor manufacturing facilities to improve substrate support and enhance overall production efficiency.

Questions about the technology: 1. How does the ceramic coating on the substrate support pedestal improve its performance?

  - The ceramic coating provides increased heat resistance and durability, making the pedestal more suitable for high-temperature manufacturing processes.

2. What are the potential cost savings associated with using this improved substrate support pedestal assembly?

  - The enhanced stability and durability of the assembly can lead to reduced equipment maintenance costs and increased production efficiency.

Original Abstract Submitted

Implementations of the present disclosure generally relate to an improved substrate support pedestal assembly. In one implementation, the substrate support pedestal assembly includes a shaft. The substrate support pedestal assembly further includes a substrate support pedestal, mechanically coupled to the shaft. The substrate support pedestal comprises substrate support plate coated on a top surface with a ceramic material.