18643761. SEMICONDUCTOR DEVICE (SAMSUNG ELECTRONICS CO., LTD.)
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Kyeong Beom Park of Suwon-si KR
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 18643761 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
A semiconductor device includes a substrate; an interlayer insulating layer disposed on the substrate; an upper wiring trench disposed in the interlayer insulating layer; and an upper wiring layer including: an upper wiring barrier layer disposed along a sidewall and a bottom surface of the upper wiring trench, an upper wiring filling layer disposed on the upper wiring barrier layer so as to fill at least a portion of an inside of the upper wiring trench, and an upper wiring capping layer disposed on an upper surface of the upper wiring filling layer, wherein the upper wiring capping layer includes cobalt (Co), and wherein a volume percentage of a crystal structure having a hexagonal close-packed structure included in the upper wiring capping layer is in a range of about 80% to about 100%.