SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

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SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18626565 titled 'SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

The abstract describes a substrate transfer device with a lift mechanism that moves up and down to transfer substrates between processing modules.

The substrate transfer device includes a substrate holder, a base, and a lift mechanism.
The lift mechanism consists of rails, seal belts, a driver, a slider, and a connecting member.
The driver moves up and down the base along the rails, while the slider moves up and down supported by the lift.
A portion of the seal belts is opened to allow the slider and base to be connected via the connecting member.

Potential Applications: - Semiconductor manufacturing - Thin film deposition processes - Solar panel production

Problems Solved: - Efficient transfer of substrates between processing modules - Precise positioning of substrates during processing

Benefits: - Increased productivity in manufacturing processes - Enhanced accuracy in substrate handling - Improved overall efficiency in production lines

Commercial Applications: Title: Advanced Substrate Transfer Device for Semiconductor Manufacturing This technology can be utilized in semiconductor fabrication facilities to streamline substrate handling processes, leading to higher throughput and improved product quality. The market implications include cost savings, increased production capacity, and enhanced competitiveness in the semiconductor industry.

Questions about the technology: 1. How does the lift mechanism improve substrate transfer efficiency? The lift mechanism allows for precise and controlled movement of substrates between processing modules, reducing the risk of errors and improving overall productivity.

2. What are the key advantages of using a substrate transfer device with a lift mechanism? The main advantages include increased automation, improved accuracy in substrate positioning, and enhanced workflow efficiency in manufacturing processes.

Original Abstract Submitted

A substrate transfer device includes: a substrate holder configured to transfer a substrate to one of a plurality of processing modules that process the substrate; a base provided to be connected to the substrate holder; and a lift configured to move up and down the base. The lift includes: a plurality of rails and a plurality of seal belts arranged side by side in a left-right direction and extending in a longitudinal direction, a driver shared by the rails and configured to move up and down the base along an extending direction of each of the rails, a slider configured to move up and down while being supported by the lift and physically connected to the plurality of rails, and a connecting member. A portion of each seal belts is opened, and the slider and the base are connected to each other via the connecting member provided in the opening.