18622089. MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS (ROHM CO., LTD.)
MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
Organization Name
Inventor(s)
Andrew Scott Hocking of Ithaca NY US
Martin Wilfried Heller of Kyoto JP
Daisuke Nishinohara of Kyoto JP
MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
This abstract first appeared for US patent application 18622089 titled 'MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
Original Abstract Submitted
A micro-electromechanical systems (MEMS) Z-axis accelerometer can comprise a substrate, a sensor configured to measure an acceleration along an axis that extends in a direction perpendicular to a plane of the substrate, and a spring axis configured to deform axially in response to the acceleration. The sensor can include a comb finger arrangement in which a comb finger overlap area is parallel with the spring axis. Fingers of the comb finger arrangement can extend in a non-sensing direction of lowest restoring force.