18595532. ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS (KABUSHIKI KAISHA TOSHIBA)
ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS
Organization Name
Inventor(s)
Kazuyuki Higashi of Yokohama JP
Kazumichi Tsumura of Shinagawa JP
Munehiro Ogasawara of Hiratsuka JP
Kenji Hirakawa of Narashino JP
ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS
This abstract first appeared for US patent application 18595532 titled 'ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS
Original Abstract Submitted
An electronic component according to an embodiment includes: a first substrate including first through holes, a first substrate surface and a second substrate surface; first electrodes provided on each of the first through holes, and including a first end and a second end; second electrodes provided on each of the first through holes, facing each of the first electrodes, and including a third end facing the first end and a fourth end facing the second end; third electrodes connected to the first end and extending toward the third end; fourth electrodes connected to the second end and extending toward the fourth end; fifth electrodes connected to the third end, provided separately from each of the third electrodes and extending toward the first end; sixth electrodes connected to the fourth end, provided separately from each of the fourth electrodes and extending toward the second end.