18590406. FOCUS RING ALIGNMENT APPARATUS (Samsung Electronics Co., Ltd.)
FOCUS RING ALIGNMENT APPARATUS
Organization Name
Inventor(s)
Wookhyeon Kwon of Suwon-si (KR)
FOCUS RING ALIGNMENT APPARATUS
This abstract first appeared for US patent application 18590406 titled 'FOCUS RING ALIGNMENT APPARATUS
Original Abstract Submitted
An embodiment provides a focus ring alignment apparatus including a frame, a sensing member that is connected to the frame and is configured to acquire images of a focus ring within in a substrate processing apparatus, and an alignment module that is connected to the frame and is configured to move the focus ring to change a position of the focus ring.
Categories:
- Samsung Electronics Co., Ltd.
- Jaehyun Soh of Suwon-si (KR)
- Wookhyeon Kwon of Suwon-si (KR)
- Chulwoo Park of Suwon-si (KR)
- Dongkyu Shin of Suwon-si (KR)
- Hoontaek Lee of Suwon-si (KR)
- Minnhoo Choi of Suwon-si (KR)
- Yongwoo Kim of Suwon-si (KR)
- Jaehyun Kim of Suwon-si (KR)
- Hansol Kim of Suwon-si (KR)
- Deukho Lee of Suwon-si (KR)
- Junghyun Cho of Suwon-si (KR)
- Yangyeon Chu of Suwon-si (KR)
- Uzun Kaan of Suwon-si (KR)
- H01J37/32
- CPC H01J37/32642
