ADSORPTION MEMBER AND METHOD FOR PRODUCING SAME

Organization Name

Inventor(s)

Masahiro Harada of Omihachiman-shi, Shiga (JP)

ADSORPTION MEMBER AND METHOD FOR PRODUCING SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 18577928 titled 'ADSORPTION MEMBER AND METHOD FOR PRODUCING SAME

The abstract describes an adsorption member made of ceramic containing silicon carbide as the main component, with protrusions formed on the surface of the substrate. Each protrusion has a placement portion for placing a to-be-treated object and a support portion.

The adsorption member includes a substrate made of ceramic with silicon carbide as the main component.
Protrusions are formed on the surface of the substrate, each consisting of a placement portion and a support portion.
The placement portion of each protrusion contains a film with materials like silicon carbide, diamond-like carbon, and others as the main component.
The films on the protrusions are independent of each other.

Potential Applications: - Industrial manufacturing processes requiring precise placement of objects. - Semiconductor manufacturing for wafer handling. - Medical devices for precise positioning during procedures.

Problems Solved: - Ensures stable and precise placement of objects during various processes. - Provides a reliable and durable adsorption member for industrial applications.

Benefits: - Improved efficiency in manufacturing processes. - Enhanced precision in object placement. - Long-lasting and durable adsorption member for industrial use.

Commercial Applications: Title: Advanced Adsorption Members for Precision Object Placement This technology can be used in industries such as semiconductor manufacturing, medical device production, and precision engineering for improved object handling and placement accuracy.

Questions about the technology: 1. How does the use of different materials in the films on the protrusions enhance the performance of the adsorption member? 2. What are the specific industries that can benefit the most from the use of this advanced adsorption member technology?

Original Abstract Submitted

An adsorption member of the present disclosure includes a substrate made of ceramic containing silicon carbide as a main component; and a plurality of protrusions formed on a surface of the substrate. Each of the plurality of protrusions includes a placement portion having a placement surface for placing a to-be-treated object and a support portion supporting the placement portion. The placement portion includes a film containing at least one type selected from the group consisting of silicon carbide, diamond-like carbon, amorphous silicon, molybdenum, chromium, and tantalum as a main component. The films are independent of one another for each of the plurality of protrusions.