18545643. SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING (Applied Materials, Inc.)
SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING
Organization Name
Inventor(s)
Nitin Deepak of Maharashtra IN
Mayur Govind Kulkarni of Karnataka IN
Miguel S. Fung of Cupertino CA US
Darius "D" Alexander-jones of Wildomar CA US
Deenesh Padhi of Saratoga CA US
Kwangduk Douglas Lee of Redwood City CA US
Ganesh Balasubramanian of Fremont CA US
Juan Carlos Rocha-alvarez of San Carlos CA US
Nagarajan Rajagopalan of San Jose CA US
SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING
This abstract first appeared for US patent application 18545643 titled 'SOFT TOUCH COATING MATERIALS FOR SUBSTRATE HANDLING
Original Abstract Submitted
Semiconductor components and systems having substrate contacting surfaces with a reduced hardness are provided. Systems and components include a ceramic, metallic, or non-metallic component for contacting a substrate. Systems and components include a layer of coating material on at least a portion of a substrate contacting surface of the component. Systems and components include where the component for contacting a substrate includes a component Vickers hardness value, and the layer of coating material exhibits a coating layer Vickers hardness value. Systems and components include where the coating layer Vickers hardness value is greater than or about 10% less than the component Vickers hardness value.
- Applied Materials, Inc.
- Nitin Deepak of Maharashtra IN
- Jennifer Sun of Fremont CA US
- Mayur Govind Kulkarni of Karnataka IN
- Miguel S. Fung of Cupertino CA US
- Darius "D" Alexander-jones of Wildomar CA US
- Chih Peng of Hayward CA US
- Deenesh Padhi of Saratoga CA US
- Kwangduk Douglas Lee of Redwood City CA US
- Ganesh Balasubramanian of Fremont CA US
- Juan Carlos Rocha-alvarez of San Carlos CA US
- Simmon Kuo of Tainan city TW
- Nagarajan Rajagopalan of San Jose CA US
- Shankho Sen of Bangalore IN
- H01L21/687
- CPC H01L21/68757