18538100. CHAMBER AND METHODS FOR DOWNSTREAM RESIDUE MANAGEMENT (Applied Materials, Inc.)
CHAMBER AND METHODS FOR DOWNSTREAM RESIDUE MANAGEMENT
Organization Name
Inventor(s)
Manjunath Veerappa Chobari Patil of Karnataka IN
Pavan Kumar S M of Karnataka IN
Xinyi Zhong of Santa Clara CA US
Bharati Neelamraju of Sunnyvale CA US
Neela Ayalasomayajula of Bengaluru IN
Prashant Kumar Kulshreshtha of San Jose CA US
Daemian Raj Benjamin Raj of Fremont CA US
Badri N. Ramamurthi of Los Gatos CA US
Mohammed Salman Mohiuddin of Santa Clara CA US
Karthik Suresh Menon of Sunnyvale CA US
Prasath Poomani of Tamilnadu IN
CHAMBER AND METHODS FOR DOWNSTREAM RESIDUE MANAGEMENT
This abstract first appeared for US patent application 18538100 titled 'CHAMBER AND METHODS FOR DOWNSTREAM RESIDUE MANAGEMENT
Original Abstract Submitted
Semiconductor processing chambers and systems, as well as methods of cleaning such chambers and systems are provided. Processing chambers and systems include a chamber body that defines a processing region, a liner positioned within the chamber body that defines a liner volume, a faceplate positioned atop the liner, a substrate support disposed within the chamber body, and a cleaning gas source coupled with the liner volume through a cleaning gas plenum and one or more inlet apertures. Systems and chambers include where at least one of the one or more inlet apertures is disposed in the processing region between the faceplate and a bottom wall of the chamber body.
- Applied Materials, Inc.
- Zaoyuan Ge of San Jose CA US
- Manjunath Veerappa Chobari Patil of Karnataka IN
- Pavan Kumar S M of Karnataka IN
- Dinesh Babu of Tamilnadu IN
- Nuo Wang of Santa Clara CA US
- Kaili Yu of Sunnyvale CA US
- Xinyi Zhong of Santa Clara CA US
- Bharati Neelamraju of Sunnyvale CA US
- Liangfa Hu of Newark CA US
- Neela Ayalasomayajula of Bengaluru IN
- Sungwon Ha of Palo Alto CA US
- Prashant Kumar Kulshreshtha of San Jose CA US
- Amit Bansal of Milpitas CA US
- Daemian Raj Benjamin Raj of Fremont CA US
- Badri N. Ramamurthi of Los Gatos CA US
- Travis Mazzy of Fremont CA US
- Mohammed Salman Mohiuddin of Santa Clara CA US
- Karthik Suresh Menon of Sunnyvale CA US
- Lihua Wu of Fremont CA US
- Prasath Poomani of Tamilnadu IN
- H01J37/32
- B08B5/00
- B08B9/00
- CPC H01J37/32862