18498011. ACOUSTIC RESONATOR DEVICES OPERATING AT HIGH-ORDER MODES (Avago Technologies International Sales Pte. Limited)
ACOUSTIC RESONATOR DEVICES OPERATING AT HIGH-ORDER MODES
Organization Name
Avago Technologies International Sales Pte. Limited
Inventor(s)
Stephan Marksteiner of München DE
Winfried Nessler of München DE
Andriy Yatsenko of Vaterstetten DE
ACOUSTIC RESONATOR DEVICES OPERATING AT HIGH-ORDER MODES
This abstract first appeared for US patent application 18498011 titled 'ACOUSTIC RESONATOR DEVICES OPERATING AT HIGH-ORDER MODES
Original Abstract Submitted
The subject technology is related to acoustic resonators. More specifically, an embodiment of the subject technology provides an acoustic resonator device that includes a piezoelectric layer disposed between a first electrode and a second electrode. The total thickness of the first electrode, the second electrode, and the third electrode allows the device to operate according to a second (or higher order) thickness extension mode. There are other embodiments as well.
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