18495719. ENVIRONMENT DETECTION APPARATUS (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.)
ENVIRONMENT DETECTION APPARATUS
Organization Name
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
Inventor(s)
MING DA Yang of TAICHUNG CITY TW
CHUN-HSUAN Lin of HSINCHU COUNTY TW
ENVIRONMENT DETECTION APPARATUS
This abstract first appeared for US patent application 18495719 titled 'ENVIRONMENT DETECTION APPARATUS
Original Abstract Submitted
An environment detection apparatus is provided. In one embodiment, the detection apparatus comprises: a first sensing device, a second sensing device in fluid communication with the first sensing device and a spectrum analyzer electrically connected to the first sensing device and the second sensing device. The first sensing device includes a pair of first electrodes configured to provide a first alternating current signal directly to a gas flowing into the first sensing device. The second sensing device includes a first filter configured to capture a solid in the gas flowing into the second sensing device and a pair of second electrodes configured to provide a second alternating current signal directly to the first filter with the solid captured by the first filter.