18485762. DEVICE AND METHOD FOR DETERMINING WAFER BOW (TOKYO ELECTRON LIMITED)
DEVICE AND METHOD FOR DETERMINING WAFER BOW
Organization Name
Inventor(s)
Daniel Fulford of Albany NY US
Mark I. Gardner of Austin TX US
Henry Jim Fulford of Marianna FL US
Anton Devilliers of Albany NY US
DEVICE AND METHOD FOR DETERMINING WAFER BOW
This abstract first appeared for US patent application 18485762 titled 'DEVICE AND METHOD FOR DETERMINING WAFER BOW
Original Abstract Submitted
An apparatus for measuring bow of a wafer, includes a substrate holder having a support surface configured to support a wafer; and a capacitor array unit including a plurality of electrodes laterally spaced from one another in the capacitor array unit. Each electrode faces the support surface and is spaced a respective fixed distance from the support surface such that each electrode can form a capacitor with an opposing area of a substrate provided on the support surface of the substrate holder.