18484165. PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM (Applied Materials, Inc.)
PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM
Organization Name
Inventor(s)
Ajith Karonnan Ramapurath of Kannur IN
Ganesh Balasubramanian of Fremont CA US
Juan Carlos Rocha-alvarez of San Carlos CA US
PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM
This abstract first appeared for US patent application 18484165 titled 'PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM
Original Abstract Submitted
Exemplary substrate support assemblies may include a support plate that comprises a substrate support surface. The assemblies may include a support stem coupled with the support plate. A channel may be defined through at least a portion of a length of the support stem and extends through the substrate support surface. A temperature sensor assembly may be disposed within the channel. The temperature sensor assembly may include a light pipe disposed within the channel such that a top end of the light pipe extending through at least a portion of the support plate. The temperature sensor assembly may include a sensor that is coupled with a bottom end of the light pipe.