18483352. CURABLE FORMULATIONS FOR POLISHING PADS (Applied Materials, Inc.)
CURABLE FORMULATIONS FOR POLISHING PADS
Organization Name
Inventor(s)
SeyedMahmoud Hosseini of San Jose CA US
Sudhakar Madhusoodhanan of San Jose CA US
Srikant Pathak of Diamond Bar CA US
CURABLE FORMULATIONS FOR POLISHING PADS
This abstract first appeared for US patent application 18483352 titled 'CURABLE FORMULATIONS FOR POLISHING PADS
Original Abstract Submitted
Printable resin precursor compositions and polishing articles including printable resin precursors are provided. Printable resin precursors include a curable precursor formulation having a viscosity of less than or about 15 cP at 70° which include at least one urethane acrylate oligomer, at least one reactive monomer, and a photoinitiator. The curable precursor formulation exhibits an ultimate tensile strength measured in mPa and an elongation at break (%), where a product of the ultimate tensile strength and the elongation at break is greater than or about 2,000.