18481271. TRENCH MOAT DECOUPLING CAPACITOR (INTERNATIONAL BUSINESS MACHINES CORPORATION)
TRENCH MOAT DECOUPLING CAPACITOR
Organization Name
INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor(s)
Herbert Lei Ho of Medfield MA US
Brent A. Anderson of Jericho VT US
John W. Golz of Hopewell Junction NY US
TRENCH MOAT DECOUPLING CAPACITOR
This abstract first appeared for US patent application 18481271 titled 'TRENCH MOAT DECOUPLING CAPACITOR
Original Abstract Submitted
Embodiments of present invention provide a capacitor structure. The capacitor structure includes a moat capacitor embedded in a substrate. The moat capacitor includes a bottom electrode plate; a dielectric layer directly above and lining the bottom electrode plate; and a top electrode plate directly above and lining the dielectric layer, where the bottom electrode plate, the dielectric layer, and the top electrode plate have encircling shapes and are arranged to be concentric with one another. A method of forming the same is also provided.