18479452. METAL SPACER 3D-MIM CAPACITOR (International Business Machines Corporation)
METAL SPACER 3D-MIM CAPACITOR
Organization Name
International Business Machines Corporation
Inventor(s)
Shravana Kumar Katakam of Lehi UT US
Ashim Dutta of Clifton Park NY US
Chih-Chao Yang of Glenmont NY US
METAL SPACER 3D-MIM CAPACITOR
This abstract first appeared for US patent application 18479452 titled 'METAL SPACER 3D-MIM CAPACITOR
Original Abstract Submitted
A metal-insulator-metal (MIM) capacitor includes a dielectric layer forming a plane and a capacitor dielectric formed in a pattern having a width parallel to the plane and a height transverse to the plane. Electrodes are formed as sidewall spacers on opposite sides of the width of the capacitor dielectric. Each of the electrodes has a contact to make an electrical connection to the electrode, the contact being disposed within the height.