18479106. DRYER TOOL AND OPERATION METHOD THEREOF (Taiwan Semiconductor Manufacturing Company, LTD.)
DRYER TOOL AND OPERATION METHOD THEREOF
Organization Name
Taiwan Semiconductor Manufacturing Company, LTD.
Inventor(s)
Jiyong Zhang of Shanghai City (CN)
DRYER TOOL AND OPERATION METHOD THEREOF
This abstract first appeared for US patent application 18479106 titled 'DRYER TOOL AND OPERATION METHOD THEREOF
Original Abstract Submitted
A method includes placing a ring-shaped bearing on a cylindrically-shaped sidewall in a chamber, the ring-shaped bearing comprising an inner race, an outer race, balls between the inner race and the outer race, and a grease among the balls; rotating the outer race of the ring-shaped bearing while the inner race of the ring-shaped bearing remains stationary relative to the cylindrically-shaped sidewall; heating the ring-shaped bearing; pumping the grease out of the chamber.