18453875. METHOD FOR PLASMA PROCESSING (Tokyo Electron Limited)
METHOD FOR PLASMA PROCESSING
Organization Name
Inventor(s)
Justin Moses of Austin TX (US)
Merritt Funk of Austin TX (US)
Chelsea Dubose of Austin TX (US)
METHOD FOR PLASMA PROCESSING
This abstract first appeared for US patent application 18453875 titled 'METHOD FOR PLASMA PROCESSING
Original Abstract Submitted
A method for multitone plasma processing includes providing a substrate into a plasma processing chamber, igniting a plasma in the plasma processing chamber with a multitone signal, and performing a first plasma process on the substrate with the plasma. The multitone signal includes a first tone and a second tone.