18439863. SEMICONDUCTOR DEVICE (SAMSUNG ELECTRONICS CO., LTD.)
SEMICONDUCTOR DEVICE
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SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 18439863 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
A semiconductor device may include a first bit line that extends in a first direction, a first active pillar and a second active pillar on the first bit line, a first gate insulating pattern enclosing the first active pillar, a second gate insulating pattern on the second active pillar, a first word line and a second word line that extends in a second direction that intersects the first direction, and a protection pattern between the first and second word lines. An air gap is between the first and second word lines and may be adjacent to the protection pattern.