18437119. SEMICONDUCTOR MANUFACTURING APPARATUS (TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION)
SEMICONDUCTOR MANUFACTURING APPARATUS
Organization Name
TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
Inventor(s)
Shun Hasebe of Nonoichi Ishikawa (JP)
SEMICONDUCTOR MANUFACTURING APPARATUS
This abstract first appeared for US patent application 18437119 titled 'SEMICONDUCTOR MANUFACTURING APPARATUS
Original Abstract Submitted
A semiconductor manufacturing apparatus according to the present embodiment includes a stage configured to support a semiconductor wafer. A probe card is positioned above the stage. A first electrode is formed of a conductive material, is movable on the stage from an outer side of the stage toward a center, and is contactable with a side surface of the semiconductor wafer.