18428207. SEMICONDUCTOR DEVICE (Samsung Electronics Co., Ltd.)
SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Sung-Hwan Jang of Suwon-si (KR)
SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 18428207 titled 'SEMICONDUCTOR DEVICE
Original Abstract Submitted
A semiconductor device includes a substrate including a recess region; a bit line contact in the recess region; a bit line on the bit line contact, the bit line extending in a first direction; a first insulating pattern covering side surfaces of the bit line contact and an inner surface of the recess region; and a second insulating pattern on the first insulating pattern, wherein an oxygen density of the first insulating pattern is higher than an oxygen density of the second insulating pattern.