18427998. METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK (SAMSUNG ELECTRONICS CO., LTD.)
METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
Organization Name
Inventor(s)
Yong Seok Choi of Yongin-si KR
Seung Min Ryu of Hwaseong-si KR
Yoon Ho Jung of Hwaseong-si KR
METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
This abstract first appeared for US patent application 18427998 titled 'METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
Original Abstract Submitted
The present invention relates to a method for manufacturing an electrostatic chuck, and more specifically, to a method for manufacturing an electrostatic chuck with minimized temperature deviation. The method of the present invention includes: a step S of forming a metal layer by depositing metal on a lower portion of a base containing a ceramic material and provided with an ESC electrode at an upper portion thereof; and a step S of forming a heater electrode by forming a pattern on the metal layer using a photolithography process.