18393132. SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE (SK hynix Inc.)
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Rho Gyu Kwak of Gyeonggi-do KR
Jung Shik Jang of Gyeonggi-do KR
Seok Min Choi of Gyeonggi-do KR
Won Geun Choi of Gyeonggi-do KR
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 18393132 titled 'SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Original Abstract Submitted
A semiconductor device may include a source structure, a support structure positioned on the source structure and including a first inclined surface extending in a second direction crossing the first direction, a gate structure positioned on the source structure and the support structure and including conductive layers and insulating layers alternately stacked, channel structures extending through the gate structure and connected to the source structure, and a slit structure extending in the first direction through the gate structure, wherein each of the conductive layers includes a second inclined surface extending in the second direction.