18382961. METAL OXIDE CONVERSION FOR MEOL AND BEOL APPLICATIONS (Applied Materials, Inc.)
METAL OXIDE CONVERSION FOR MEOL AND BEOL APPLICATIONS
Organization Name
Inventor(s)
Mohammad Mahdi Tavakoli of Santa Clara CA US
Bencherki Mebarki of Santa Clara CA US
Joung Joo Lee of San Jose CA US
Avgerinos V. Gelatos of Scotts Valley CA US
METAL OXIDE CONVERSION FOR MEOL AND BEOL APPLICATIONS
This abstract first appeared for US patent application 18382961 titled 'METAL OXIDE CONVERSION FOR MEOL AND BEOL APPLICATIONS
Original Abstract Submitted
A method of capping a metal layer includes performing a conversion process to reduce a metal oxide layer formed on a top surface of the metal layer and form a metal sulfide layer on the top surface of the metal layer, exposing the top surface of the metal layer to an oxidizing environment, and performing a removal process to remove the metal sulfide layer.