18377138. COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM (Applied Materials, Inc.)
COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM
Organization Name
Inventor(s)
Ryan T. Downey of San Jose CA US
Shaun W. Crawford of Santa Clara CA US
COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM
This abstract first appeared for US patent application 18377138 titled 'COMPACT SCRUBBER FOR PLASMA ABATEMENT GAS STREAM
Original Abstract Submitted
Disclosed herein are an auxiliary abatement device for abating effluent gases, an abatement system including the auxiliary abatement device, and an abatement method for the abatement system. The auxiliary abatement device includes a first chamber comprising a first inlet configured to receive the effluent gases; and a second chamber configured to treat the effluent gases and comprising a second inlet configured to receive a reagent, a first outlet configured to output treated effluent gases, and a second outlet configured to output a byproduct produced by treating the effluent gases. The first chamber and the second chamber are coupled by a conduit. The abatement system includes a plasma unit and an auxiliary abatement device to partially treat the effluent gases. The abatement system utilizes a primary abatement unit disposed downstream of the plasma unit and the auxiliary abatement device to treat the effluent gases in bulk.