18372804. FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF (Applied Materials, Inc.)
FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF
Organization Name
Inventor(s)
David Ishikawa of Mountain View CA US
Sumedh Dattatraya Acharya of Karnataka IN
Arun Nagarajan of Georgetown TX US
FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF
This abstract first appeared for US patent application 18372804 titled 'FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF
Original Abstract Submitted
Certain embodiments of the present disclosure relate to a fluid flow valve. The fluid flow valve includes a housing configured to receive a flow of fluid. The fluid flow valve further includes a first valve portion configured to proportionally control the flow of fluid through the housing. The fluid flow valve further includes a second valve portion in series with the first valve portion along a fluid flow path within the housing. The second valve portion is configured to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.
