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18368311. METHODS AND MECHANISMS FOR TRACE-BASED TRANSFER LEARNING (Applied Materials, Inc.)

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METHODS AND MECHANISMS FOR TRACE-BASED TRANSFER LEARNING

Organization Name

Applied Materials, Inc.

Inventor(s)

Fei Li of Houston TX US

Jimmy Iskandar of Fremont CA US

James Robert Moyne of Canton MI US

METHODS AND MECHANISMS FOR TRACE-BASED TRANSFER LEARNING

This abstract first appeared for US patent application 18368311 titled 'METHODS AND MECHANISMS FOR TRACE-BASED TRANSFER LEARNING

Original Abstract Submitted

An electronic device manufacturing system configured identify a machine-learning model trained to generate analytic or predictive data for a first substrate processing domain associated with a type of substrate processing system. The system is further configured to obtain first trace data pertaining to the first domain used to train the machine-learning model. The system is further configured to a transfer model for a second substrate processing domain associated with the type of substrate processing system. The transfer model is generated based on the first trace data pertaining to the first substrate processing domain and second trace data pertaining to the second substrate processing domain. Using the transfer model, at least one of the machine-learning model or current trace data associated with the second substrate processing domain is modified to enable the machine-learning model to generate analytic or predictive data associated with the second substrate processing domain.

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