OPTICAL APPARATUS FOR LASER ANNEALING

Organization Name

International Business Machines Corporation

Inventor(s)

Russell A. Budd of North Salem NY (US)

Jason S. Orcutt of Katonah NY (US)

Eric Zhang of Sleepy Hollow NY (US)

Yves Martin of Ossining NY (US)

OPTICAL APPARATUS FOR LASER ANNEALING

This abstract first appeared for US patent application 18236382 titled 'OPTICAL APPARATUS FOR LASER ANNEALING

Original Abstract Submitted

An optical microscope device comprises an optically integrated configuration of components for imaging a target device within a field of view of the optical microscope device, and for laser annealing the target device by generating a laser beam spot pattern from a laser beam received on an optical fiber from a remote laser source, and for controlling a duration of exposure of the laser beam spot pattern for laser annealing the target device.