18218979. VACUUM ENABLED GRIPPER WITH ROLLER CONTACT FINGERS (Applied Materials, Inc.)
VACUUM ENABLED GRIPPER WITH ROLLER CONTACT FINGERS
Organization Name
Inventor(s)
Balasubramaniam Cj of Coimbatore (IN)
VACUUM ENABLED GRIPPER WITH ROLLER CONTACT FINGERS
This abstract first appeared for US patent application 18218979 titled 'VACUUM ENABLED GRIPPER WITH ROLLER CONTACT FINGERS
Original Abstract Submitted
The present disclosure describes a substrate gripping clamp. The substrate gripping clamp includes a clamp arm and a roller recess disposed therein. The substrate gripping clamp also includes a gripper disposed within the roller recess and coupled to the clamp arm. The gripper further includes a top bevel face, a bottom bevel face, and a mid roller face between the top bevel face and the bottom bevel face.