18210524. METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS (Applied Materials, Inc.)
METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS
Organization Name
Inventor(s)
Aaron P. Webb of Austin TX (US)
Krag R. Senior of Austin TX (US)
Chris Czajka of Dripping Springs TX (US)
Charles T. Carlson of Cedar Park TX (US)
Jason M. Schaller of Austin TX (US)
METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS
This abstract first appeared for US patent application 18210524 titled 'METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS
Original Abstract Submitted
An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator comprising at least one acceleration stage including a resonator coil coupled to a drift tube assembly, the drift tube assembly including a first drift tube coupled to a first end of a first insulting rod via interference fit, a second drift tube coupled to a first end of a second insulting rod via interference fit, and a mounting bracket coupled to a second end of the first insulting rod and to a second end of the second insulting rod via interference fit.