EMBEDDED MECHANICAL STOPPER FOR THERMAL SENSOR DEVICE

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Inventor(s)

EMBEDDED MECHANICAL STOPPER FOR THERMAL SENSOR DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18182058 titled 'EMBEDDED MECHANICAL STOPPER FOR THERMAL SENSOR DEVICE

The patent application describes thermal sensor devices that utilize TMOS devices with a mass suspended over a cavity by springs connected between a frame and the mass. Stoppers are included to limit the movement of the springs and the mass, preventing excessive motion.

Stoppers are formed from sidewalls supporting a top cap over the frame, springs, and mass.
The stoppers are constructed using overlapping metal layers during fabrication.
The overlapping metal layers create a sturdy structure that effectively limits the movement of the springs and mass.
This design ensures the proper functioning of the thermal sensor devices by maintaining the desired position of the mass.

Potential Applications: - Thermal sensors in electronic devices - Temperature monitoring systems in industrial settings - Heat management in automotive applications

Problems Solved: - Prevents excessive movement of the mass in thermal sensor devices - Ensures accurate temperature readings by maintaining the position of the mass

Benefits: - Improved reliability and accuracy of thermal sensors - Enhanced performance in temperature monitoring applications - Increased durability and longevity of the devices

Commercial Applications: Title: "Enhanced Thermal Sensor Devices for Precise Temperature Monitoring" This technology can be utilized in various industries such as electronics, automotive, and manufacturing for efficient temperature monitoring and heat management.

Questions about the technology: 1. How does the design of the stoppers contribute to the stability of the thermal sensor devices? 2. What are the potential implications of using overlapping metal layers in the fabrication of the stoppers?

Original Abstract Submitted

Disclosed herein are thermal sensor devices including TMOS devices with a mass suspended over a cavity by springs extending between a frame and the mass. The thermal sensor devices include stoppers that limit upward and/or downward movement of the springs and therefore the mass. These stoppers are formed from sidewalls supporting a top cap over the frame, springs, and mass. The stoppers are constructed by using various overlapping metal layers during fabrication. Details of forming the stoppers using these overlapping metal layers are contained here.