INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD

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INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18153242 titled 'INFORMATION PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD

Simplified Explanation

The patent application describes an information processing apparatus that is used in substrate processing. It includes an acquisition unit that collects process information about the substrate process, such as process data and process conditions. The apparatus also has a display control unit that controls the display on a display apparatus based on the acquired process information.

The display control unit can show two different screens on the display apparatus.
The first screen displays the process data of a lot, which is a group of substrates, on a lot-by-lot basis.
The second screen displays the process data of a specific lot on a substrate-by-substrate basis.
The user can select a lot from the first screen to view its detailed process data on the second screen.

Potential applications of this technology:

Semiconductor manufacturing: This information processing apparatus can be used in the production of semiconductor substrates to monitor and analyze the process data of different lots.
Display panel manufacturing: It can also be applied in the production of display panels to track and optimize the substrate processing.

Problems solved by this technology:

Efficient data visualization: The apparatus provides a flexible display that allows users to view process data either on a lot-by-lot or substrate-by-substrate basis, enabling them to analyze and compare the data more effectively.
User-friendly interface: The ability to select and switch between different screens simplifies the navigation and access to specific process information.

Benefits of this technology:

Improved process monitoring: By displaying process data in a more detailed and customizable manner, the apparatus helps users identify any variations or issues in the substrate processing, leading to better quality control.
Enhanced decision-making: The ability to view process data at different levels of granularity enables users to make more informed decisions regarding process optimization and troubleshooting.

Original Abstract Submitted

An information processing apparatus includes an acquisition unit configured to acquire process information about a substrate process, the process information including process data and a process condition, and a display control unit configured to control a display on a display apparatus based on the process information acquired by the acquisition unit, wherein the display control unit selectively displays, on the display apparatus, a first screen that displays the process data of a lot including a plurality of substrates on a lot-by-lot basis and a second screen that displays the process data of a first lot on a substrate-by-substrate basis, the first lot being a lot designated by a user from the lot displayed on the first screen.