HIGH DENSITY PMUT ARRAY ARCHITECTURE FOR ULTRASOUND IMAGING

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Inventor(s)

HIGH DENSITY PMUT ARRAY ARCHITECTURE FOR ULTRASOUND IMAGING - A simplified explanation of the abstract

This abstract first appeared for US patent application 18123602 titled 'HIGH DENSITY PMUT ARRAY ARCHITECTURE FOR ULTRASOUND IMAGING

Simplified Explanation:

This patent application describes a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) that includes a substrate with conductive vias, an insulating layer with through-holes, an interconnection layer, a membrane, and a piezoelectric stack. The piezoelectric stack vibrates the membrane in response to an alternating voltage, allowing for ultrasonic wave generation.

The substrate is doped and contains conductive vias that are electrically isolated by an isolating structure.
An insulating layer with through-holes is stacked on the substrate, allowing for connections to the conductive vias.
An interconnection layer is connected to the conductive vias and carries a membrane that delimits a chamber.
A piezoelectric stack is formed on the membrane and vibrates it in response to an alternating voltage, generating ultrasonic waves.

Potential Applications:

1. Medical imaging devices 2. Non-destructive testing equipment 3. Underwater communication systems

Problems Solved:

1. Efficient generation of ultrasonic waves 2. Precise control of vibrations 3. Integration of multiple components in a compact device

Benefits:

1. High-resolution imaging 2. Improved signal quality 3. Compact and lightweight design

Commercial Applications:

Potential commercial applications include medical imaging equipment, industrial testing devices, and underwater communication systems. The compact and efficient design of the PMUT makes it suitable for various industries requiring ultrasonic wave generation.

Prior Art:

Prior research in the field of piezoelectric transducers and micromachined devices can provide valuable insights into the development and applications of PMUT technology.

Frequently Updated Research:

Researchers are continually exploring new materials and fabrication techniques to enhance the performance and capabilities of PMUTs for a wide range of applications.

Questions about Piezoelectric Micromachined Ultrasonic Transducers:

1. How does the design of a PMUT differ from traditional ultrasonic transducers? 2. What are the key advantages of using a piezoelectric stack in a PMUT compared to other vibration mechanisms?

Original Abstract Submitted

A PMUT includes a substrate being doped and having a plurality of conductive vias formed therein, each conductive via formed of a portion of the substrate extending completely from a back side of the substrate to a front side of the substrate and being encircled by an isolating structure that electrically isolates that portion of the substrate from other portions of the substrate. An insulating layer stacked on the front side of the substrate and has through-holes therein over the plurality of conductive vias. An interconnection layer is stacked on the insulating layer and is connected to the plurality of conductive vias. A membrane carried is by the interconnection layer and underlying substrate, the membrane being shaped so as to delimit a chamber. A piezoelectric stack formed on the membrane over the chamber and vibrates the membrane in response to application of an alternating voltage to the piezoelectric stack.