HEATER

Organization Name

Sumitomo Electric Industries, Ltd.

Inventor(s)

Daisuke Shimao of Osaka-shi, Osaka JP

Koichi Kimura of Osaka-shi, Osaka JP

Shigenobu Sakita of Osaka-shi, Osaka JP

Kohei Sakaguchi of Osaka-shi, Osaka JP

Katsuhiro Itakura of Osaka-shi, Osaka JP

HEATER

This abstract first appeared for US patent application 18008677 titled 'HEATER

Original Abstract Submitted

A heater including: a base body; a high frequency electrode and a heating element arranged inside the base body; and a support body, the base body including a first surface on which a heating target is mounted, a second surface to which a first end portion of the support body is attached, a first flow path having an gas intake provided on the first surface, a second flow path having an gas exhaust provided in a region inside the support body on the second surface, and a third flow path connecting the first flow path and the second flow path, each of the high frequency electrode, the heating element, and the third flow path being arranged in a plane parallel to the first surface, the heating element and the third flow path being arranged closer to the second surface than the high frequency electrode.