Applied Materials, Inc. patent applications published on November 9th, 2023
Contents
- 1 Patent applications for Applied Materials, Inc. on November 9th, 2023
- 1.1 OZONE-BASED LOW TEMPERATURE SILICON OXIDE COATING FOR PHARMACEUTICAL APPLICATIONS (18199625)
- 1.2 CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL (18356604)
- 1.3 Carrier Head Membrane With Regions of Different Roughness (18351260)
- 1.4 COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM (17735655)
- 1.5 POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL (17735674)
- 1.6 METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES (18142305)
- 1.7 ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING (18224206)
- 1.8 APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY (17862138)
- 1.9 RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR (17737682)
- 1.10 METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING (17737318)
- 1.11 HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL (17737659)
- 1.12 CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER (17737670)
- 1.13 OPTICAL DEVICE IMPROVEMENT (18131997)
- 1.14 TEMPERATURE AND BIAS CONTROL OF EDGE RING (18356915)
- 1.15 AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES (17737665)
- 1.16 LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION (17737340)
- 1.17 SILICON-AND-CARBON-CONTAINING MATERIALS WITH LOW DIELECTRIC CONSTANTS (17737328)
- 1.18 PULSED ETCH PROCESS (17738526)
- 1.19 LOW TEMPERATURE CARBON GAPFILL (17737311)
- 1.20 WAFER FILM FRAME CARRIER (17735623)
- 1.21 COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING (18356553)
- 1.22 COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING (18356579)
- 1.23 SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS (18224861)
- 1.24 CONFORMAL METAL DICHALCOGENIDES (17739856)
- 1.25 DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES (17736843)
- 1.26 IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES (17737677)
Patent applications for Applied Materials, Inc. on November 9th, 2023
OZONE-BASED LOW TEMPERATURE SILICON OXIDE COATING FOR PHARMACEUTICAL APPLICATIONS (18199625)
Main Inventor
Fei Wang
CHEMICAL MECHANICAL POLISHING TEMPERATURE SCANNING APPARATUS FOR TEMPERATURE CONTROL (18356604)
Main Inventor
Hari Soundararajan
Carrier Head Membrane With Regions of Different Roughness (18351260)
Main Inventor
Young J. Paik
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM (17735655)
Main Inventor
Jeonghoon Oh
POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL (17735674)
Main Inventor
Jeonghoon Oh
METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES (18142305)
Main Inventor
Yingdong LUO
ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING (18224206)
Main Inventor
Muhannad Mustafa
APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY (17862138)
Main Inventor
Zubin HUANG
RF MEASUREMENT FROM A TRANSMISSION LINE SENSOR (17737682)
Main Inventor
David Coumou
METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DURING SUBSTRATE MANUFACTURING (17737318)
Main Inventor
Mitesh Sanghvi
HIGH BANDWIDTH ARCHITECTURE FOR CENTRALIZED COHERENT CONTROL AT THE EDGE OF PROCESSING TOOL (17737659)
Main Inventor
David Coumou
CONTROL AND PREDICTION OF MULTIPLE PLASMA COUPLING SURFACES AND CORRESPONDING POWER TRANSFER (17737670)
Main Inventor
David Coumou
OPTICAL DEVICE IMPROVEMENT (18131997)
Main Inventor
Yue CHEN
TEMPERATURE AND BIAS CONTROL OF EDGE RING (18356915)
Main Inventor
James ROGERS
AUTONOMOUS FREQUENCY RETRIEVAL FROM PLASMA POWER SOURCES (17737665)
Main Inventor
David Coumou
LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION (17737340)
Main Inventor
Supriya Ghosh
SILICON-AND-CARBON-CONTAINING MATERIALS WITH LOW DIELECTRIC CONSTANTS (17737328)
Main Inventor
Zeqing Shen
PULSED ETCH PROCESS (17738526)
Main Inventor
Yifeng Zhou
LOW TEMPERATURE CARBON GAPFILL (17737311)
Main Inventor
Supriya Ghosh
WAFER FILM FRAME CARRIER (17735623)
Main Inventor
Jason A. Rye
COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING (18356553)
Main Inventor
Jason M. SCHALLER
COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING (18356579)
Main Inventor
Jason M. SCHALLER
SELF-ALIGNMENT ETCHING OF INTERCONNECT LAYERS (18224861)
Main Inventor
Suketu Arun PARIKH
CONFORMAL METAL DICHALCOGENIDES (17739856)
Main Inventor
Chandan Das
DRY TREATMENT FOR SURFACE LOSS REMOVAL IN MICRO-LED STRUCTURES (17736843)
Main Inventor
Michel Khoury
IMPEDANCE TUNING UTILITY OF VECTOR SPACE DEFINED BY TRANSMISSION LINE QUANTITIES (17737677)
Main Inventor
David Coumou
