18364397. MICROELECTRONIC DEVICES WITH MIRRORED BLOCKS OF MULTI-SET STAIRCASED STADIUMS, AND RELATED SYSTEMS AND METHODS simplified abstract (Micron Technology, Inc.)

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MICROELECTRONIC DEVICES WITH MIRRORED BLOCKS OF MULTI-SET STAIRCASED STADIUMS, AND RELATED SYSTEMS AND METHODS

Organization Name

Micron Technology, Inc.

Inventor(s)

Lifang Xu of Boise ID (US)

Umberto Maria Meotto of Dietlikon (CH)

Aaron S. Yip of Los Gatos CA (US)

MICROELECTRONIC DEVICES WITH MIRRORED BLOCKS OF MULTI-SET STAIRCASED STADIUMS, AND RELATED SYSTEMS AND METHODS - A simplified explanation of the abstract

This abstract first appeared for US patent application 18364397 titled 'MICROELECTRONIC DEVICES WITH MIRRORED BLOCKS OF MULTI-SET STAIRCASED STADIUMS, AND RELATED SYSTEMS AND METHODS

Simplified Explanation

- Microelectronic devices have a stack with alternating insulative and conductive structures arranged in tiers. - Slit structures divide the stack into blocks. - The first block in a pair of blocks has stadiums with multiple parallel sets of staircases. - The second block in the pair has additional stadiums with mirrored multiple parallel sets of staircases. - Common mask openings are used to form the mirrored staircase profiles after the stadiums are at their final depths. - This technology allows for the creation of complex structures within microelectronic devices.

Potential Applications

- Microelectronics - Semiconductor devices - Integrated circuits

Problems Solved

- Creating complex structures within microelectronic devices - Improving performance and functionality of microelectronic devices

Benefits

- Enhanced functionality of microelectronic devices - Improved performance - Increased efficiency in fabrication process


Original Abstract Submitted

Microelectronic devices include a stack having a vertically alternating sequence of insulative and conductive structures arranged in tiers. Slit structures extend through the stack, dividing the stack into blocks. A first series of stadiums—within the stack of a first block of a pair of the blocks—includes at least one stadium having multiple parallel sets of staircases. A second series of stadiums—within the stack of a second block of the pair of blocks—includes at least one additional stadium having additional multiple parallel sets of staircases that are mirrored, across one of the slit structures, to the multiple parallel sets of staircases of the first series. In methods of fabrication, common mask openings are used to form the mirrored staircase profiles once stadiums are already at substantially their final depths in the stack structure. Electronic systems are also disclosed.