US Patent Application 18296418. CALIBRATION METHOD, DETECTION SYSTEM, EXPOSURE APPARATUS, ARTICLE MANUFACTURING METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM simplified abstract
CALIBRATION METHOD, DETECTION SYSTEM, EXPOSURE APPARATUS, ARTICLE MANUFACTURING METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
Organization Name
Inventor(s)
HIRONOBU Fujishima of Saitama (JP)
WATARU Yamaguchi of Tochigi (JP)
CALIBRATION METHOD, DETECTION SYSTEM, EXPOSURE APPARATUS, ARTICLE MANUFACTURING METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM - A simplified explanation of the abstract
- This abstract for appeared for US patent application number 18296418 Titled 'CALIBRATION METHOD, DETECTION SYSTEM, EXPOSURE APPARATUS, ARTICLE MANUFACTURING METHOD, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM'
Simplified Explanation
The abstract describes a calibration method for a detection system that consists of an illumination system and an imaging system. The method involves obtaining defocus characteristics for different combinations of apertures in both systems. These characteristics indicate the shift in the image formed on the photoelectric conversion element when the detection target is defocused. The apertures are positioned in a shifted position from a reference position.
Original Abstract Submitted
A calibration method of a detection system including an illumination system configured to illuminate a detection target, and an imaging system configured to form an image of light from the detection target on a photoelectric conversion element, the method including obtaining, for each of at least two combinations of first apertures in the illumination system and second apertures in the imaging system, each of which is formed by selecting one first aperture and one second aperture from the plurality of first apertures and the plurality of second apertures, a defocus characteristic indicating a shift amount of the image on the photoelectric conversion element with respect to a defocus amount of the detection target in a state in which each of the first aperture and the second aperture is positioned in a first position shifted from a reference position.
