US Patent Application 18142305. METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES simplified abstract

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METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES

Organization Name

Applied Materials, Inc.


Inventor(s)

Yingdong Luo of Newark CA (US)

Rami Hourani of Santa Clara CA (US)

Xiaopei Deng of San Jose CA (US)

Kang Luo of San Jose CA (US)

Erica Chen of Cupertino CA (US)

Ludovic Godet of Sunnyvale CA (US)

METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES - A simplified explanation of the abstract

This abstract first appeared for US patent application 18142305 titled 'METHODS, SYSTEMS, AND APPARATUS FOR INKJET PRINTING SELF-ASSEMBLED MONOLOAYER (SAM) STRUCTURES ON SUBSTRATES

Simplified Explanation

- The present disclosure is about a method, system, and apparatus for inkjet printing self-assembled monolayer (SAM) structures on substrates. - The method involves printing one or more SAM layers on a substrate surface in a localized manner, leaving a portion of the substrate surface exposed to the inkjet chamber's processing region. - The printing process includes spraying subsections of the substrate surface with an ink that has a SAM composition. - The SAM composition of the ink includes an active component and a hydrophobic tail. - This innovation allows for precise and controlled deposition of SAM structures on substrates using inkjet printing technology.


Original Abstract Submitted

Embodiments of the present disclosure relate to methods, systems, and apparatus for inkjet printing self-assembled monolayer (SAM) structures on substrates. In one embodiment, which can be combined with other embodiments, one or more SAM layers are printed on a substrate surface of a substrate in a localized manner such that a portion of the substrate surface is left exposed to a processing region of the inkjet chamber. The printing includes spraying one or more subsections of the substrate surface with an ink, the ink having a SAM composition. The SAM composition includes an active component, and a hydrophobic tail.