US Patent Application 17829132. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract

From WikiPatents
Jump to navigation Jump to search

PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE

Organization Name

CANON KABUSHIKI KAISHA==Inventor(s)==

[[Category:Niyaz Khusnatdinov of Round Rock TX (US)]]

PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE - A simplified explanation of the abstract

This abstract first appeared for US patent application 17829132 titled 'PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE

Simplified Explanation

The abstract describes a planarization apparatus that includes a superstrate chuck.

  • The superstrate chuck has inner lands and a peripheral land protruding from its surface.
  • The inner lands are located within the periphery of the superstrate chuck.
  • The peripheral land is smaller in height compared to the inner lands.
  • The width of the peripheral land is larger than the width of the inner lands.
  • The design of the peripheral land helps control pressure leakage to be below a certain threshold.


Original Abstract Submitted

A planarization apparatus comprising a superstrate chuck is provided. The superstrate includes a plurality of inner lands protruding from a surface of the superstrate chuck and a peripheral land protruding from the surface of the superstrate chuck along a periphery of the superstrate chuck and encircling the inner lands therein. The peripheral land has a height smaller than a height of each of the inner lands. The peripheral land has a width sufficiently larger than a width of each of the inner lands such that a pressure leakage through the peripheral land is controlled to be less than a threshold.

Retrieved from "http://wikipatents.org/index.php?title=US_Patent_Application_17829132._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract&oldid=9323"